In the name of of Allah the Merciful

Levitation Micro-Systems: Applications to Sensors and Actuators

Kirill Poletkin, 3030589072, 978-3030589073, 978-3030589073, B08NWWD68C

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English | 2021 | PDF

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This book presents inductive and hybrid levitation micro-systems and their applications in micro-sensors and –actuators. It proposes and discusses analytical and quasi-finite element techniques for modeling levitation micro-systems based on the Lagrangian formalism. In particular, micro-bearings, -actuators, -accelerators and –accelerometers based on inductive levitation are comprehensively described with accompanying experimental measurements.